Sputtering of Resistor Films
![Thin film resistor samples Thin film resistor samples](https://www.yourthinfilmsource.com/wp-content/uploads/2017/03/UltraSource_1191_2.jpg)
Tantalum nitride films are reactively sputtered in order to provide highly stable resistor films with low temperature coefficient of resistance (TCR) performance. Nichrome films are also available.
Tantalum nitride films are reactively sputtered in order to provide highly stable resistor films with low temperature coefficient of resistance (TCR) performance. Nichrome films are also available.